ALIO, (which is Latin for “A better way.”) is an innovator in nano technology motion systems. ALIO’s designs exceed current standards of precision product designs for automation technology.  Holding two patents for the Parallel 6 Axis Hexapod and the Parallel 3 Axis Tripod, ALIO has set the pace for nano precision design.

ALIO’s linear and rotary stage lines were designed to be cost effective and complement the market demand for high resolution, nano precision motion. These applications can be used in normal atmospheric environments, clean rooms, and vacuum chamber environments. ALIO’s design of the rotary stages can be utilized for stand-alone motion or stackable for various serial kinematic structures.

ALIO has also developed a series of standard and custom high-resolution air bearing stages for nano-precision applications. These robust stages offer the same 5-nanometer resolution capabilities as our standard products with high stiffness and speeds from1 micron/sec to over 1 m/sec depending onapplication needs. These air-bearing stages are well suited when smooth, precise motion is required for advacned FPD and Semiconductor metrology, process and repair.

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 XY Stage

Open Frame XY